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In Situ Process Monitoring - Wafer Measurement and Process Monitoring | KLA-Tencor

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KLA-Tencor's SensArray SensorWafers provide a unique way, not available from conventional process monitoring equipments, to monitoring the effects of the process environment on production wafers.

Language: English Owner: SensArray Corporation Backlinks: 13 Page Rank: 5 Last Checked: 04/08/2013
ProcessMonitoringSensarrayWaferThermalIn Situ Process Monitoring

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